{"id":6,"date":"2026-07-02T11:07:28","date_gmt":"2026-07-02T03:07:28","guid":{"rendered":"https:\/\/core.iccourt.com\/?p=6"},"modified":"2026-07-02T11:07:28","modified_gmt":"2026-07-02T03:07:28","slug":"pie%ef%bc%88%e5%b7%a5%e8%89%ba%e6%95%b4%e5%90%88%e5%b7%a5%e7%a8%8b%e5%b8%88%ef%bc%89%e6%a0%b8%e5%bf%83%e7%9f%a5%e8%af%86%e6%a1%86%e6%9e%b6","status":"publish","type":"post","link":"https:\/\/core.iccourt.com\/?p=6","title":{"rendered":"PIE\uff08\u5de5\u827a\u6574\u5408\u5de5\u7a0b\u5e08\uff09\u6838\u5fc3\u77e5\u8bc6\u6846\u67b6"},"content":{"rendered":"\n<h1 class=\"wp-block-heading\"><\/h1>\n\n\n\n<h2 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E4%B8%80-pie%E7%9A%84%E8%A7%92%E8%89%B2%E5%AE%9A%E4%BD%8D\"><\/a>\u4e00\u3001PIE\u7684\u89d2\u8272\u5b9a\u4f4d<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>PIE\u662f\u6676\u5706\u5382\u7684\u6280\u672f\u67a2\u7ebd<\/strong>\u2014\u2014\u8fde\u63a5\u5404\u4e2aModule\uff08\u5149\u523b\u3001\u523b\u8680\u3001\u8584\u819c\u3001\u6269\u6563\/CMP\u3001\u6ce8\u5165\u7b49\uff09\uff0c\u5bf9\u6700\u7ec8\u6676\u5706<strong>\u7535\u6027\u548c\u826f\u7387<\/strong>\u8d1f\u8d23\u3002<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u5bf9\u6bd4<\/th><th>PIE<\/th><th>Module PE<\/th><\/tr><\/thead><tbody><tr><td>\u89c6\u89d2<\/td><td>\u5168\u6d41\u7a0b<\/td><td>\u5355Module<\/td><\/tr><tr><td>\u76ee\u6807<\/td><td>\u7535\u6027\u8fbe\u6807+\u9ad8\u826f\u7387<\/td><td>\u5de5\u827a\u7a97\u53e3\u7a33\u5b9a<\/td><\/tr><tr><td>\u6280\u80fd<\/td><td>\u61c2\u6240\u6709Module + \u61c2\u7535\u6027<\/td><td>\u6df1\u94bb\u672cModule<\/td><\/tr><tr><td>\u65e5\u5e38<\/td><td>\u770blot\u6570\u636e\u3001\u67e5inline\u5f02\u5e38\u3001\u5206defect\u3001\u8c03recipe<\/td><td>\u5b88spec\u3001\u5904\u7406\u62a5\u8b66<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h2 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E4%BA%8C-%E6%A0%B8%E5%BF%83%E7%9F%A5%E8%AF%86%E6%A1%86%E6%9E%B6%E5%85%AD%E5%A4%A7%E6%94%AF%E6%9F%B1\"><\/a>\u4e8c\u3001\u6838\u5fc3\u77e5\u8bc6\u6846\u67b6\uff08\u516d\u5927\u652f\u67f1\uff09<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E6%94%AF%E6%9F%B11%E5%99%A8%E4%BB%B6%E7%89%A9%E7%90%86%E5%9F%BA%E7%A1%80\"><\/a>\u652f\u67f11\uff1a\u5668\u4ef6\u7269\u7406\u57fa\u7840<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u8fd9\u662fPIE\u7684<strong>\u5e95\u5c42\u8bed\u8a00<\/strong>\uff0c\u4e0d\u61c2\u5668\u4ef6\u7269\u7406\u5c31\u542c\u4e0d\u61c2\u7535\u6027\u53cd\u9988\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u5fc5\u987b\u638c\u63e1\u7684\u6982\u5ff5\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>MOSFET\u57fa\u672c\u7ed3\u6784<\/strong>\uff1aGate, Source, Drain, Channel, Substrate<\/li>\n\n\n\n<li><strong>\u9608\u503c\u7535\u538b Vth<\/strong>\uff1a\u53d7Gate Oxide\u539a\u5ea6\u3001\u63ba\u6742\u6d53\u5ea6\u3001\u754c\u9762\u9677\u9631\u5f71\u54cd<\/li>\n\n\n\n<li><strong>\u9971\u548c\u7535\u6d41 Idsat \/ \u7ebf\u6027\u7535\u6d41 Idlin<\/strong>\uff1a\u53cd\u6620\u9a71\u52a8\u80fd\u529b<\/li>\n\n\n\n<li><strong>\u51fb\u7a7f\u7535\u538b BV<\/strong>\uff1aGox BV, Junction BV, BVdss<\/li>\n\n\n\n<li><strong>\u4e9a\u9608\u503c\u6446\u5e45 SS<\/strong>\uff1a\u53cd\u6620\u6805\u63a7\u80fd\u529b\uff0cSS = 2.3 \u00d7 kT\/q \u00d7 (1 + Cd\/Cox)<\/li>\n\n\n\n<li><strong>\u8fc1\u79fb\u7387 \u03bc<\/strong>\uff1a\u53d7\u63ba\u6742\u6563\u5c04\u3001\u754c\u9762\u6563\u5c04\u3001\u5e94\u529b\u5f71\u54cd<\/li>\n\n\n\n<li><strong>\u63a5\u89e6\u7535\u963b Rc \/ \u6e90\u6f0f\u4e32\u8054\u7535\u963b Rsd<\/strong><\/li>\n\n\n\n<li><strong>LDD\/Halo\u7ed3\u6784<\/strong>\uff1a\u70ed\u8f7d\u6d41\u5b50\u6291\u5236\u4e0e\u77ed\u6c9f\u9053\u6548\u5e94\u4e4b\u95f4\u7684trade-off<\/li>\n\n\n\n<li><strong>\u77ed\u6c9f\u9053\u6548\u5e94 SCE<\/strong>\uff1aVth roll-off, DIBL\uff08\u6f0f\u81f4\u52bf\u5792\u964d\u4f4e\uff09\u2192 DIBL = \u0394Vth \/ \u0394Vds<\/li>\n\n\n\n<li><strong>\u7a84\u6c9f\u9053\u6548\u5e94 NCE<\/strong>\uff1aSTI\u8fb9\u7f18\u5bc4\u751f<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u8bb0\u5fc6\u53e3\u8bc0\uff1aPIE\u7684\u516d\u5927\u7535\u6027\u53c2\u6570 \u2192 Vth, Idsat, Idlin, Ioff, BV, Rs<\/strong><\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E6%94%AF%E6%9F%B12%E5%B7%A5%E8%89%BA%E5%85%A8%E6%B5%81%E7%A8%8B%E7%9F%A5%E8%AF%86\"><\/a>\u652f\u67f12\uff1a\u5de5\u827a\u5168\u6d41\u7a0b\u77e5\u8bc6<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">PIE\u5fc5\u987b\u77e5\u9053<strong>\u6bcf\u4e00\u6b65\u5bf9\u6700\u7ec8\u5668\u4ef6\u7684\u5f71\u54cd<\/strong>\u3002\u4ee5\u4e0b\u662f\u5178\u578bCMOS\u5de5\u827a\u6d41\u7a0b\u7684PIE\u89c6\u89d2\uff1a<\/p>\n\n\n\n<pre class=\"wp-block-code\"><code>\u2460 \u886c\u5e95\u51c6\u5907 (Substrate\/Well) \u2192 \u9631\u7535\u963b\u3001\u95e9\u9501\u6548\u5e94\n\u2461 STI (\u6d45\u69fd\u9694\u79bb) \u2192 \u9694\u79bb\u6f0f\u7535\u3001STI\u5e94\u529b\u3001\u8fb9\u7f18\u7f3a\u9677\n\u2462 \u9631\/\u6c9f\u9053\u6ce8\u5165 (Well\/Channel Implant) \u2192 Vth\u8bbe\u5b9a\u3001\u77ed\u6c9f\u9053\u6548\u5e94\n\u2463 \u6805\u6c27\u5316 + \u591a\u6676\u7845\u6805 \u2192 Gox\u8d28\u91cf\u3001EOT\u3001\u754c\u9762\u6001Nit\n\u2464 \u6805\u56fe\u5f62\u5316 (Gate Patterning) \u2192 CD\u63a7\u5236\u3001\u6805\u4fa7\u58c1\u7c97\u7cd9\u5ea6\n\u2465 LDD\u6ce8\u5165 + \u6805\u4fa7\u5899(Spacer) \u2192 \u70ed\u8f7d\u6d41\u5b50\u3001HCI\u53ef\u9760\u6027\n\u2466 \u6e90\u6f0f\u6ce8\u5165\/\u9000\u706b \u2192 Rsd\u3001\u7ed3\u6df1Xj\u3001\u70ed\u9884\u7b97\n\u2467 \u63a5\u89e6\u5b54(Contact) + \u91d1\u5c5e\u5316 \u2192 Rc\u3001\u7535\u8fc1\u79fbEM\u3001\u5e94\u529b\u8fc1\u79fbSM\n\u2468 \u949d\u5316\u5c42 (Passivation) \u2192 \u4fdd\u62a4\u3001\u5e94\u529b\u8c03\u63a7\n<\/code><\/pre>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u5173\u952e\u8ba4\u77e5<\/strong>\uff1aPIE\u4e0d\u9700\u8981\u77e5\u9053\u6bcf\u4e2aModule recipe\u7684\u6bcf\u4e2a\u7ec6\u8282\uff0c\u4f46\u9700\u8981\u77e5\u9053<strong>\u6bcf\u4e2a\u6b65\u9aa4\u7684\u53d8\u5316\u5982\u4f55\u5f71\u54cd\u6700\u7ec8\u7535\u6027<\/strong>\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E6%94%AF%E6%9F%B13%E7%94%B5%E6%80%A7%E6%B5%8B%E8%AF%95%E4%B8%8E%E5%8F%82%E6%95%B0%E5%88%86%E6%9E%90\"><\/a>\u652f\u67f13\uff1a\u7535\u6027\u6d4b\u8bd5\u4e0e\u53c2\u6570\u5206\u6790<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">**WAT\uff08Wafer Acceptance Test\uff09**\u662fPIE\u7684&#8221;\u542c\u8bca\u5668&#8221;\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u5e38\u89c1\u6d4b\u8bd5\u7ed3\u6784\uff1a<\/strong><\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u6d4b\u8bd5\u7ed3\u6784<\/th><th>\u6d4b\u4ec0\u4e48<\/th><th>PIE\u5173\u6ce8\u4ec0\u4e48<\/th><\/tr><\/thead><tbody><tr><td>Single FET (\u5927W\/L)<\/td><td>Vth, Idsat, Idlin, Gm<\/td><td>\u5de5\u827a\u6f02\u79fb<\/td><\/tr><tr><td>\u9635\u5217FET<\/td><td>RDF\u968f\u673a\u63ba\u6742\u6da8\u843d<\/td><td>\u5747\u5300\u6027<\/td><\/tr><tr><td>Ring Oscillator<\/td><td>\u5ef6\u8fdf\u3001\u529f\u8017<\/td><td>\u901f\u5ea6\/\u529f\u8017\u5e73\u8861<\/td><\/tr><tr><td>SRAM Bitcell<\/td><td>SNM, \u8bfb\/\u5199\u65f6\u5e8f<\/td><td>\u826f\u7387\u74f6\u9888<\/td><\/tr><tr><td>Kelvin Resistor<\/td><td>Rc, Rs, Rpoly<\/td><td>\u63a5\u89e6\/\u91d1\u5c5e\/\u591a\u6676\u7535\u963b<\/td><\/tr><tr><td>Comb\/Meander<\/td><td>\u91d1\u5c5e\u7ebf\u95f4\u6f0f\u7535\/\u77ed\u8def<\/td><td>\u7f3a\u9677\u5bc6\u5ea6<\/td><\/tr><tr><td>Diode<\/td><td>\u7ed3\u6f0f\u7535\u3001\u51fb\u7a7f<\/td><td>\u7f3a\u9677\/\u635f\u4f24<\/td><\/tr><tr><td>Capacitor<\/td><td>Gox\u6f0f\u7535\u3001C-V<\/td><td>\u6c27\u5316\u5c42\u8d28\u91cf<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>PIE\u7684WAT\u6392\u67e5\u903b\u8f91\uff1a<\/strong><\/p>\n\n\n\n<pre class=\"wp-block-code\"><code>\u95ee\u9898\uff1aIdsat\u504f\u4f4e\n\u2193\n\u2192 Idlin\u4e5f\u4f4e\uff1f\u2192 \u53ef\u80fd\u8fc1\u79fb\u7387\u95ee\u9898\uff08\u6805\u6c27\u3001\u5e94\u529b\uff09\n\u2192 Idlin\u6b63\u5e38\uff1f\u2192 \u53ef\u80fd\u662fRsd\u504f\u9ad8\uff08\u6ce8\u5165\/\u9000\u706b\uff09\n\u2192 Vth\u504f\u9ad8\uff1f\u2192 \u6805\/\u6c9f\u9053\u63ba\u6742\u6216Gox\u539a\u5ea6\n\u2192 Ioff\u504f\u9ad8\uff1f\u2192 \u77ed\u6c9f\u9053\u6548\u5e94\u6216\u6805\u6f0f\u7535\n<\/code><\/pre>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E6%94%AF%E6%9F%B14%E8%89%AF%E7%8E%87%E5%88%86%E6%9E%90\"><\/a>\u652f\u67f14\uff1a\u826f\u7387\u5206\u6790<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u826f\u7387\u516c\u5f0f\uff1a<\/strong><\/p>\n\n\n\n<pre class=\"wp-block-code\"><code>Y = Y_BEOL \u00d7 Y_FEOL \u00d7 Y_Package\n<\/code><\/pre>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u826f\u7387\u635f\u5931\u5206\u7c7b\uff1a<\/strong><\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u7c7b\u578b<\/th><th>\u5178\u578b\u539f\u56e0<\/th><th>\u6539\u5584\u624b\u6bb5<\/th><\/tr><\/thead><tbody><tr><td><strong>\u7cfb\u7edf\u826f\u7387<\/strong>&nbsp;(Systematic)<\/td><td>\u5de5\u827a\u7a97\u53e3\u7a84\u3001OPC\u95ee\u9898\u3001CMP\u789f\u5f62<\/td><td>\u8c03\u6574\u5de5\u827a\u7a97\u53e3\u3001DOE<\/td><\/tr><tr><td><strong>\u968f\u673a\u826f\u7387<\/strong>&nbsp;(Random)<\/td><td>\u9897\u7c92(Particle)\u3001\u6676\u4f53\u7f3a\u9677<\/td><td>Cleanliness\u3001\u7f3a\u9677\u5bc6\u5ea6\u63a7\u5236<\/td><\/tr><tr><td><strong>\u53c2\u6570\u826f\u7387<\/strong>&nbsp;(Parametric)<\/td><td>Ron\u3001Vth\u6f02\u79fb\u51faspec<\/td><td>\u5de5\u827a\u4e2d\u5fc3\u503c\u8c03\u6574<\/td><\/tr><tr><td><strong>\u53ef\u9760\u6027\u826f\u7387<\/strong><\/td><td>HCI\u3001BTI\u3001TDDB<\/td><td>\u5de5\u827a\u4f18\u5316+\u7b5b\u9009<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u826f\u7387\u5206\u6790\u5de5\u5177\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>Bin Map<\/strong>\u00a0\u2192 \u7a7a\u95f4\u5206\u5e03\u6a21\u5f0f\uff08\u4e2d\u5fc3\u597d\/\u8fb9\u7f18\u597d\/\u6761\u7eb9\uff09<\/li>\n\n\n\n<li><strong>Pareto Chart<\/strong>\u00a0\u2192 \u6309\u5931\u6548\u6a21\u5f0f\u6392\u5e8f<\/li>\n\n\n\n<li><strong>Inkless Bitmap<\/strong>\u00a0\u2192 SRAM\u5931\u6548\u4f4d\u5206\u6790\uff08defect\u6027 vs \u7535\u6027\uff09<\/li>\n\n\n\n<li><strong>YAT (Yield Analysis Tool)<\/strong>\u00a0\u2192 \u6676\u5706\u7ea7\u3001Lot\u7ea7\u8d8b\u52bf<\/li>\n\n\n\n<li><strong>\u7edf\u8ba1\u5206\u6790<\/strong>\u00a0\u2192 Cp\/Cpk, SPC, t-test, ANOVA<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u7f3a\u9677\u5bf9\u826f\u7387\u7684\u5f71\u54cd\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>Killer Defect<\/strong>\u00a0\u2192 \u76f4\u63a5\u5bfc\u81f4die\u5931\u6548\uff08\u91d1\u5c5e\u6865\u63a5\u3001\u591a\u6676\u65ad\u7ebf\uff09<\/li>\n\n\n\n<li><strong>Non-killer Defect<\/strong>\u00a0\u2192 \u5f71\u54cd\u53ef\u9760\u6027\uff0c\u53ef\u80fd\u6210\u4e3a\u6f5c\u5728\u5931\u6548<\/li>\n\n\n\n<li><strong>Critical Area Analysis<\/strong>\u00a0\u2192 \u5173\u952e\u533a\u57df\u8d8a\u5927\uff0c\u7f3a\u9677\u8d8a\u81f4\u547d<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E6%94%AF%E6%9F%B15%E7%BC%BA%E9%99%B7%E5%88%86%E6%9E%90%E4%B8%8E%E6%A3%80%E6%B5%8B\"><\/a>\u652f\u67f15\uff1a\u7f3a\u9677\u5206\u6790\u4e0e\u68c0\u6d4b<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">PIE\u7684&#8221;\u773c\u775b&#8221;\u2014\u2014\u7f3a\u9677\u5de5\u7a0b\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u68c0\u6d4b\u624b\u6bb5\uff1a<\/strong><\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u5de5\u5177<\/th><th>\u80fd\u770b\u4ec0\u4e48<\/th><th>PIE\u5173\u5fc3\u4ec0\u4e48<\/th><\/tr><\/thead><tbody><tr><td>KLA\u626b\u63cf (Bright\/Dark)<\/td><td>\u6676\u5706Scale\u7684\u5916\u6765\u9897\u7c92\u3001\u5212\u4f24<\/td><td>Adders\u3001\u7f3a\u9677\u5bc6\u5ea6\u8d8b\u52bf<\/td><\/tr><tr><td>SEM Review<\/td><td>\u9ad8\u5206\u8fa8\u7f3a\u9677\u5f62\u8c8c<\/td><td>\u7f3a\u9677\u7c7b\u578b\u5224\u65ad<\/td><\/tr><tr><td>E-beam Review<\/td><td>\u7535\u6027\u7f3a\u9677<\/td><td>\u65ad\u7ebf\/\u6865\u63a5\/\u63a5\u89e6\u5931\u6548<\/td><\/tr><tr><td>ADC (Automatic Defect Classification)<\/td><td>\u81ea\u52a8\u5206\u7c7b<\/td><td>Pareto\u3001\u6839\u6e90\u5206\u6790<\/td><\/tr><tr><td>Inline Inspection<\/td><td>\u5404\u5173\u952e\u5c42\u7684\u626b\u63cf<\/td><td>Layer-specific defectivity<\/td><\/tr><tr><td>TEM<\/td><td>\u7eb3\u7c73\u7ea7\u622a\u9762<\/td><td>Gox\u9677\u9631\u3001\u4fa7\u5899\u5f62\u8c8c<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>PIE\u7f3a\u9677\u5206\u6790\u65b9\u6cd5\u8bba\uff1a<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u6bd4\u8f83\u6cd5<\/strong>\uff1aGood lot vs Bad lot \u627e\u5dee\u5f02\u5c42 + \u5dee\u5f02\u533a\u57df<\/li>\n\n\n\n<li><strong>\u63a8\u79fb\u6cd5<\/strong>\uff1a\u770b\u7f3a\u9677\u5bc6\u5ea6\u968f\u5de5\u827a\u6b65\u9aa4\u7684\u7d2f\u79ef<\/li>\n\n\n\n<li><strong>\u7a7a\u95f4\u76f8\u5173\u6cd5<\/strong>\uff1aBin map \u00d7 Defect map overlay<\/li>\n\n\n\n<li><strong>Split lot\u9a8c\u8bc1<\/strong>\uff1a\u9501\u5b9a\u5173\u952e\u5c42\u7684\u6839\u672c\u539f\u56e0<\/li>\n<\/ol>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E6%94%AF%E6%9F%B16%E7%BB%9F%E8%AE%A1%E5%88%86%E6%9E%90%E8%83%BD%E5%8A%9B\"><\/a>\u652f\u67f16\uff1a\u7edf\u8ba1\u5206\u6790\u80fd\u529b<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">PIE\u6ca1\u6709\u6570\u636e\u80fd\u529b\u5bf8\u6b65\u96be\u884c\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>SPC<\/strong>\uff1aCp, Cpk, Cpm, \u63a7\u5236\u56fe\uff08Xbar-R, I-MR\uff09<\/li>\n\n\n\n<li><strong>DOE<\/strong>\uff1aFull factorial, Fractional factorial, RS, Taguchi<\/li>\n\n\n\n<li><strong>\u5047\u8bbe\u68c0\u9a8c<\/strong>\uff1at-test, ANOVA \u2192 \u5224\u65ad\u53d8\u5316\u662f\u5426\u663e\u8457<\/li>\n\n\n\n<li><strong>\u65b9\u5dee\u5206\u6790<\/strong>\uff1aWithin-wafer, Wafer-to-wafer, Lot-to-lot<\/li>\n\n\n\n<li><strong>\u76f8\u5173\u6027\u5206\u6790<\/strong>\uff1a\u53c2\u6570 vs \u53c2\u6570\uff0c\u53c2\u6570 vs \u826f\u7387<\/li>\n\n\n\n<li><strong>Shmoo plot<\/strong>\uff1a\u7535\u538b\u00d7\u9891\u7387\u2192\u64cd\u4f5c\u7a97\u53e3<\/li>\n<\/ul>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h2 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E4%B8%89-%E5%B8%B8%E8%A7%81%E7%94%B5%E6%80%A7%E5%BC%82%E5%B8%B8%E7%A4%BA%E4%BE%8B%E5%8A%A9%E4%BD%A0%E5%BB%BA%E7%AB%8B%E7%9B%B4%E8%A7%89\"><\/a>\u4e09\u3001\u5e38\u89c1\u7535\u6027\u5f02\u5e38\u793a\u4f8b\uff08\u52a9\u4f60\u5efa\u7acb\u76f4\u89c9\uff09<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E7%A4%BA%E4%BE%8B1idsat%E5%81%8F%E4%BD%8E%E4%BD%86idsatidlin%E6%AD%A3%E5%B8%B8\"><\/a>\u793a\u4f8b1\uff1aIdsat\u504f\u4f4e\u4f46Idsat%\/Idlin%\u6b63\u5e38<\/h3>\n\n\n\n<pre class=\"wp-block-code\"><code>\u73b0\u8c61\uff1aIdsat -5%, Idlin -5%, Vth\u6b63\u5e38\uff0cIoff\u6b63\u5e38\n\u63a8\u6d4b\uff1a\u8fc1\u79fb\u7387\u4e0b\u964d\n\u2193\n\u6392\u67e5\u65b9\u5411\uff1a\n  \u2192 \u6805\u6c27\u8d28\u91cf\uff08Nit\u754c\u9762\u6001\u589e\u52a0\uff09\u2192 \u66f4\u9661\u7684SS\uff1f\n  \u2192 \u5e94\u529b\u53d8\u5316\uff08\u6e90\u6f0fSiGe\u6216CESL\u5e94\u529b\u819c\uff09\n  \u2192 \u6c9f\u9053\u63ba\u6742\u589e\u6b96\uff08\u6ce8\u5165\u6216\u9000\u706b\uff09\n  \u2192 \u8f7d\u6d41\u5b50\u6563\u5c04\u589e\u52a0\uff08\u6676\u683c\u7f3a\u9677\uff09\n<\/code><\/pre>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E7%A4%BA%E4%BE%8B2vth%E5%81%8F%E9%AB%98-idsat%E5%81%8F%E4%BD%8E-ioff%E5%81%8F%E4%BD%8E\"><\/a>\u793a\u4f8b2\uff1aVth\u504f\u9ad8 + Idsat\u504f\u4f4e + Ioff\u504f\u4f4e<\/h3>\n\n\n\n<pre class=\"wp-block-code\"><code>\u73b0\u8c61\uff1aVth +8%, Idsat -10%, Ioff -50%\n\u63a8\u6d4b\uff1a\u6c9f\u9053\u63ba\u6742\u6d53\u5ea6\u504f\u9ad8 \u6216 \u6805\u6c27\u504f\u539a\n\u2193\n\u6392\u67e5\u65b9\u5411\uff1a\n  \u2192 \u9631\/\u6c9f\u9053\u6ce8\u5165\uff08\u5242\u91cf\u504f\u5927\u6216\u80fd\u91cf\u4e0d\u5bf9\uff09\n  \u2192 \u70ed\u9884\u7b97\uff08\u9000\u706b\u6e29\u5ea6\/\u65f6\u95f4\u4e0d\u8db3\uff0c\u63ba\u6742\u6269\u6563\u4e0d\u591f\uff09\n  \u2192 RTO\u6c27\u5316\u5c42\u539a\u5ea6\uff08\u6805\u6c27\u504f\u539a\uff09\n  \u2192 \u4fa7\u5899\u538b\u5e94\u529b\u53d8\u5316\uff08\u6539\u53d8\u4e86\u6c9f\u9053\u63ba\u6742\u5206\u5e03\uff09\n<\/code><\/pre>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E7%A4%BA%E4%BE%8B3dibl%E5%81%8F%E5%A4%A7vth%E9%9A%8Fvds%E5%8F%98%E5%8C%96%E5%A4%A7\"><\/a>\u793a\u4f8b3\uff1aDIBL\u504f\u5927\uff08Vth\u968fVds\u53d8\u5316\u5927\uff09<\/h3>\n\n\n\n<pre class=\"wp-block-code\"><code>\u73b0\u8c61\uff1aVth_lin\u6b63\u5e38\uff0cVth_sat\u504f\u4f4e\uff0cIoff\u504f\u9ad8\n\u63a8\u6d4b\uff1a\u77ed\u6c9f\u9053\u6548\u5e94\u63a7\u5236\u4e0d\u826f\n\u2193\n\u6392\u67e5\u65b9\u5411\uff1a\n  \u2192 \u6805\u957fCD\u504f\u5c0f\uff08\u5149\u523b\/\u523b\u8680CD\u6f02\u79fb\uff09\n  \u2192 \u6c9f\u9053\u6ce8\u5165\u4e0d\u8db3\uff08Halo\/Pocket\uff09\n  \u2192 \u7ed3\u6269\u6563\u8fc7\u6df1\uff08\u70ed\u9884\u7b97\u8fc7\u5927\uff09\n  \u2192 STI\u9694\u79bb\u9000\u5316\n<\/code><\/pre>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E7%A4%BA%E4%BE%8B4ioff%E5%81%8F%E9%AB%98%E4%BD%86vth%E6%AD%A3%E5%B8%B8\"><\/a>\u793a\u4f8b4\uff1aIoff\u504f\u9ad8\u4f46Vth\u6b63\u5e38<\/h3>\n\n\n\n<pre class=\"wp-block-code\"><code>\u73b0\u8c61\uff1aIoff 10\u00d7\u504f\u9ad8\uff0cVth\u6b63\u5e38\uff0cIdsat\u6b63\u5e38\n\u63a8\u6d4b\uff1a\u6805\u6f0f\u7535\u6216\u7ed3\u6f0f\u7535\u6216\u4e9a\u9608\u503c\u6f0f\u7535\n\u2193\n\u6392\u67e5\u65b9\u5411\uff1a\n  \u2192 \u6676\u5706\u4e0a\u6f0f\u7535\u7684\u5206\u5e03 \u2192 \u770bBin Map\n  \u2192 \u5c40\u57df\u6027\u6f0f\u7535 \u2192 \u7f3a\u9677\uff08\u9897\u7c92\/\u5212\u4f24\/Gox pinhole\uff09\n  \u2192 \u5168\u7247Ioff\u6f02\u79fb \u2192 Gox\u8d28\u91cf\u3001\u6e05\u6d01\u5ea6\n  \u2192 Gate Oxide\u6f0f\u7535\uff08\u76f4\u63a5\u96a7\u7a7fFG\uff09vs Subthreshold\u6f0f\u7535\n<\/code><\/pre>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E7%A4%BA%E4%BE%8B5%E6%8E%A5%E8%A7%A6%E7%94%B5%E9%98%BBrc%E5%81%8F%E9%AB%98\"><\/a>\u793a\u4f8b5\uff1a\u63a5\u89e6\u7535\u963bRc\u504f\u9ad8<\/h3>\n\n\n\n<pre class=\"wp-block-code\"><code>\u73b0\u8c61\uff1aIdsat -8%, Idlin -8%, Vth\u6b63\u5e38\n\u63a8\u6d4b\uff1a\u6e90\u6f0f\u63a5\u89e6\u95ee\u9898\n\u2193\n\u6392\u67e5\u65b9\u5411\uff1a\n  \u2192 Silicide\u5f62\u6210\u5f02\u5e38\uff08\u6e29\u5ea6\/\u65f6\u95f4\u4e0d\u8db3\uff09\n  \u2192 Contact W filling\u7a7a\u6d1e\n  \u2192 \u63a5\u89e6\u5b54\u523b\u8680\u6b8b\u7559\u6216\u4fa7\u58c1\u805a\u5408\u7269\n  \u2192 \u63a5\u89e6\u5b54\u5e95Si\u635f\u4f24\n  \u2192 Ti\/TiN\u52bf\u5792\u5c42\u539a\u5ea6\n<\/code><\/pre>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E7%A4%BA%E4%BE%8B6ring-oscillator%E9%A2%91%E7%8E%87%E5%81%8F%E4%BD%8E\"><\/a>\u793a\u4f8b6\uff1aRing Oscillator\u9891\u7387\u504f\u4f4e<\/h3>\n\n\n\n<pre class=\"wp-block-code\"><code>\u73b0\u8c61\uff1aRO\u9891\u7387 -12% at same Vdd\n\u63a8\u6d4b\uff1a\u5668\u4ef6\u901f\u5ea6\u6162\n\u2193\n\u6392\u67e5\u65b9\u5411\uff1a\n  \u2192 FET\u9a71\u52a8\u80fd\u529b\uff08Idsat\u504f\u4f4e\uff1f\u2192 \u524d\u9762\u6392\u67e5\uff09\n  \u2192 \u4e92\u8fde\u5ef6\u8fdfRC\u504f\u5927\n  \u2192 BEOL\u7535\u5bb9\u504f\u9ad8\uff08ILD\u539a\u5ea6\u3001K\u503c\uff09\n  \u2192 \u8d1f\u8f7d\u6548\u5e94\u6216\u903b\u8f91\u8bbe\u8ba1\u56e0\u7d20\n<\/code><\/pre>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h2 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E5%9B%9B-%E5%B8%B8%E8%A7%81%E8%89%AF%E7%8E%87%E5%BC%82%E5%B8%B8%E7%A4%BA%E4%BE%8B\"><\/a>\u56db\u3001\u5e38\u89c1\u826f\u7387\u5f02\u5e38\u793a\u4f8b<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E7%A4%BA%E4%BE%8B1sram-bin%E5%A4%B1%E6%95%88%E5%91%88%E7%B0%87%E7%8A%B6%E5%88%86%E5%B8%83\"><\/a>\u793a\u4f8b1\uff1aSRAM Bin\u5931\u6548\u5448&#8221;\u7c07\u72b6&#8221;\u5206\u5e03<\/h3>\n\n\n\n<pre class=\"wp-block-code\"><code>Bin Map\u5448\u73b0\uff1aEdge heavy \u6216 \u6676\u5706\u4e2d\u5fc3cluster\n\u63a8\u6d4b\uff1aParticle defect cluster\n\u2193\n\u6392\u67e5\uff1a\n  \u2192 Overlay KLA\u626b\u63cfMap \u00d7 Bin Map \u2192 \u627ecorrelation\n  \u2192 \u5206\u5c42(Polish\/Layer)KLA\u6570\u636e \u2192 \u627eaddition\u5c42\n  \u2192 SEM review\u786e\u8ba4\u7f3a\u9677\u7c7b\u578b\n  \u2192 \u8ffd\u6e90\u5934\uff1a\u8bbe\u5907PM\u5468\u671f\u3001lot\u5386\u53f2\n<\/code><\/pre>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E7%A4%BA%E4%BE%8B2%E6%89%AB%E6%8F%8F%E5%8F%91%E7%8E%B0%E7%89%B9%E5%AE%9A%E5%B1%82adders-spike\"><\/a>\u793a\u4f8b2\uff1a\u626b\u63cf\u53d1\u73b0\u7279\u5b9a\u5c42Adders spike<\/h3>\n\n\n\n<pre class=\"wp-block-code\"><code>\u73b0\u8c61\uff1a\u67d0Layer KLA adders\u7a81\u7136\u4ece10\/pcs \u2192 200\/pcs\n\u63a8\u6d4b\uff1a\u8bbe\u5907\u5f02\u5e38\u6216\u5de5\u827a\u504f\u79bb\n\u2193\n\u6392\u67e5\uff1a\n  \u2192 \u65f6\u95f4\u8f74\u67e5lot\u8f68\u8ff9 \u2192 \u9501\u5b9a\u53ef\u7591\u8bbe\u5907\/chamber\n  \u2192 \u67e5\u8be5\u8bbe\u5907PM\u8bb0\u5f55\u3001Recipe\u7248\u672c\u3001\u6c14\u4f53\u8d28\u91cf\n  \u2192 \u8be5\u5c42SEM Review\u5206\u7c7b \u2192 \u5224\u65ad\u7c7b\u578b\uff08Particle\/Scratch\/Micro-trench\uff09\n  \u2192 DOE\u9a8c\u8bc1 \u2192 \u6545\u969c\u8bbe\u5907\u505amonitor wafer\u786e\u8ba4\n<\/code><\/pre>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E7%A4%BA%E4%BE%8B3bin-fail-pattern%E5%91%88%E7%8E%AF%E7%8A%B6\"><\/a>\u793a\u4f8b3\uff1aBin Fail Pattern\u5448&#8221;\u73af\u72b6&#8221;<\/h3>\n\n\n\n<pre class=\"wp-block-code\"><code>\u73b0\u8c61\uff1a\u6676\u5706\u8fb9\u7f18\u4e00\u5708Binning fails\n\u63a8\u6d4b\uff1aCMP\u8fb9\u7f18\u6548\u5e94\u3001\u6216\u523b\u8680\u8d1f\u8f7d\u6548\u5e94\n\u2193\n\u6392\u67e5\uff1a\n  \u2192 \u67e5CMP removal rate profile\uff08\u8fb9\u7f18\u504f\u6162\/\u504f\u5feb\uff1f\uff09\n  \u2192 \u67e5\u523b\u8680\u901f\u7387\u5747\u5300\u6027\uff08\u8fb9\u7f18\u504f\u6162\u2192Oxide\u6b8b\u7559\uff1f\uff09\n  \u2192 \u67e5\u5149\u523b\u8fb9\u7f18\u66dd\u5149\u5747\u5300\u6027\n  \u2192 \u67e5\u819c\u539a\u5747\u5300\u6027\n<\/code><\/pre>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E7%A4%BA%E4%BE%8B4%E8%89%AF%E7%8E%87%E9%9A%8Flot%E6%B8%90%E8%BF%9B%E5%BC%8F%E4%B8%8B%E9%99%8D\"><\/a>\u793a\u4f8b4\uff1a\u826f\u7387\u968fLot\u6e10\u8fdb\u5f0f\u4e0b\u964d<\/h3>\n\n\n\n<pre class=\"wp-block-code\"><code>\u73b0\u8c61\uff1a\u540c\u4e00\u4ea7\u54c1\uff0cbatch1 yield 92% \u2192 batch5 yield 80%\n\u63a8\u6d4b\uff1a\u5de5\u827a\u6f02\u79fb\u6216\u8bbe\u5907\u9000\u5316\n\u2193\n\u6392\u67e5\uff1a\n  \u2192 \u67e5SPC\u8d8b\u52bf\u56fe\uff08\u5173\u952e\u5c42\u7684CD\u3001\u819c\u539a\u3001Overlay\u7b49\uff09\n  \u2192 \u9694\u79bb\u5230\u5177\u4f53\u5c42\u548c\u8bbe\u5907\n  \u2192 \u9488\u5bf9\u6027\u9884\u9632\u7ef4\u62a4\uff08PM\uff09\n<\/code><\/pre>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h2 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E4%BA%94-%E5%B8%B8%E8%A7%81defect%E7%A4%BA%E4%BE%8Bpie%E8%A7%86%E8%A7%92\"><\/a>\u4e94\u3001\u5e38\u89c1Defect\u793a\u4f8b\uff08PIE\u89c6\u89d2\uff09<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E7%B1%BB%E5%88%AB1%E5%89%8D%E6%AE%B5%E7%BC%BA%E9%99%B7feol-defects\"><\/a>\u7c7b\u522b1\uff1a\u524d\u6bb5\u7f3a\u9677\uff08FEOL Defects\uff09<\/h3>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u7f3a\u9677\u7c7b\u578b<\/th><th>\u6210\u56e0<\/th><th>\u7535\u6027\u5f71\u54cd<\/th><th>\u68c0\u6d4b\u624b\u6bb5<\/th><\/tr><\/thead><tbody><tr><td><strong>Stacking Fault<\/strong><\/td><td>\u6676\u4f53\u5916\u5ef6\u7f3a\u9677<\/td><td>\u7ed3\u6f0f\u7535\u2191\u3001Idsat\u2193<\/td><td>DIC, TEM<\/td><\/tr><tr><td><strong>Gox Pinhole<\/strong><\/td><td>\u6c27\u5316\u5c42\u9897\u7c92\/\u6c61\u67d3<\/td><td>\u6805\u6f0f\u7535\u2191\u3001\u51fb\u7a7f\u2193<\/td><td>TDDB, I-V<\/td><\/tr><tr><td><strong>Dislocation<\/strong><\/td><td>\u9ad8\u5242\u91cf\u6ce8\u5165\/\u5e94\u529b<\/td><td>\u7ed3\u6f0f\u7535\u3001SRAM\u5931\u6548<\/td><td>DIC, E-beam<\/td><\/tr><tr><td><strong>Spacer\u8131\u843d<\/strong><\/td><td>Spacer\u523b\u8680\/\u6e05\u6d17<\/td><td>Vth\u504f\u79fb\u3001Ioff\u2191<\/td><td>SEM<\/td><\/tr><tr><td><strong>Poly\u6b8b\u6709\u4f59<\/strong><\/td><td>\u6805\u523b\u8680\u4e0d\u5b8c\u5168<\/td><td>\u77ed\u8def\u3001\u6f0f\u7535<\/td><td>KLA+SEM<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E7%B1%BB%E5%88%AB2%E4%B8%AD%E6%AE%B5%E7%BC%BA%E9%99%B7mol-defects\"><\/a>\u7c7b\u522b2\uff1a\u4e2d\u6bb5\u7f3a\u9677\uff08MOL Defects\uff09<\/h3>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u7f3a\u9677\u7c7b\u578b<\/th><th>\u6210\u56e0<\/th><th>\u7535\u6027\u5f71\u54cd<\/th><th>\u68c0\u6d4b\u624b\u6bb5<\/th><\/tr><\/thead><tbody><tr><td><strong>SA\/Poly\u6865\u63a5<\/strong><\/td><td>\u6805\u4e0e\u6e90\u6f0f\u77ed\u8def<\/td><td>\u529f\u80fd\u6027fail<\/td><td>E-beam<\/td><\/tr><tr><td><strong>Contact\u672a\u5f00<\/strong><\/td><td>\u63a5\u89e6\u5b54\u523b\u8680endpoint\u4e0d\u51c6<\/td><td>Rc\u2191\u3001\u5931\u6548<\/td><td>E-beam, TEM<\/td><\/tr><tr><td><strong>Contact\u6865\u63a5<\/strong><\/td><td>\u63a5\u89e6\u5b54\u95f4\u8ddd\u8fc7\u5c0f<\/td><td>\u77ed\u8def<\/td><td>E-beam, TEM<\/td><\/tr><tr><td><strong>Silicide\u4e0d\u8db3<\/strong><\/td><td>\u9000\u706b\u504f\u79fb<\/td><td>Rc\u2191\u3001Idsat\u2193<\/td><td>\u7535\u963b\u6d4b\u8bd5\u3001SEM<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E7%B1%BB%E5%88%AB3%E5%90%8E%E6%AE%B5%E7%BC%BA%E9%99%B7beol-defects\"><\/a>\u7c7b\u522b3\uff1a\u540e\u6bb5\u7f3a\u9677\uff08BEOL Defects\uff09<\/h3>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u7f3a\u9677\u7c7b\u578b<\/th><th>\u6210\u56e0<\/th><th>\u7535\u6027\u5f71\u54cd<\/th><th>\u68c0\u6d4b\u624b\u6bb5<\/th><\/tr><\/thead><tbody><tr><td><strong>\u91d1\u5c5e\u6865\u63a5<\/strong><\/td><td>CMP\u789f\u5f62\/\u9897\u7c92\u7269<\/td><td>\u77ed\u8def<\/td><td>KLA, SEM<\/td><\/tr><tr><td><strong>\u91d1\u5c5e\u7a7a\u6d1e<\/strong><\/td><td>\u7535\u9540\/\u9000\u706b\u4e0d\u826f<\/td><td>\u7535\u963b\u2191\u3001EM\u5931\u6548<\/td><td>KLA+SEM\/TEM<\/td><\/tr><tr><td><strong>Via\u7f3a\u5931<\/strong><\/td><td>\u901a\u5b54\u523b\u8680\/\u586b\u5145<\/td><td>\u5f00\u8def<\/td><td>E-beam, TEM<\/td><\/tr><tr><td><strong>ILD\u88c2\u7eb9<\/strong><\/td><td>CMP\u5e94\u529b<\/td><td>\u6f0f\u7535\u3001\u53ef\u9760\u6027\u2193<\/td><td>KLA, SEM<\/td><\/tr><tr><td><strong>\u91d1\u5c5e\u7ebf\u7c97\u7cd9<\/strong><\/td><td>\u523b\u8680\u6761\u4ef6<\/td><td>RC\u2191\u3001\u4fe1\u53f7\u5ef6\u8fdf<\/td><td>AFM, SEM<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#pie%E7%BC%BA%E9%99%B7%E6%8E%92%E6%9F%A5%E6%B5%81%E7%A8%8B%E9%80%90%E6%AD%A5%E9%80%BB%E8%BE%91\"><\/a>PIE\u7f3a\u9677\u6392\u67e5\u6d41\u7a0b\uff08\u9010\u6b65\u903b\u8f91\uff09\uff1a<\/h3>\n\n\n\n<pre class=\"wp-block-code\"><code>Step 1: \u786e\u8ba4\u7f3a\u9677\u4e0e\u5931\u6548\u7684\u65f6\u7a7a\u76f8\u5173\u6027\n  \u2192 BinMap + DefectMap Overlay\nStep 2: \u786e\u8ba4\u7f3a\u9677\u4ea7\u751f\u7684\u5de5\u827a\u5c42\n  \u2192 \u9010\u5c42KLA\u6570\u636e\u5206\u6790\nStep 3: \u786e\u8ba4\u7f3a\u9677\u7c7b\u578b\n  \u2192 SEM\/ADC review\nStep 4: \u8ffd\u6839\u6eaf\u6e90\n  \u2192 \u8bbe\u5907\/\u5de5\u827a\/\u6750\u6599\/\u8bbe\u8ba1\nStep 5: \u9a8c\u8bc1\n  \u2192 Split lot\nStep 6: \u95ed\u73af\u6539\u5584\n  \u2192 Recipe\/PM\/material change\n<\/code><\/pre>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h2 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E5%85%AD-%E7%BB%99%E6%96%B0pie%E7%9A%84%E5%AD%A6%E4%B9%A0%E8%B7%AF%E5%BE%84%E5%BB%BA%E8%AE%AE\"><\/a>\u516d\u3001\u7ed9\u65b0PIE\u7684\u5b66\u4e60\u8def\u5f84\u5efa\u8bae<\/h2>\n\n\n\n<pre class=\"wp-block-code\"><code>\u7b2c1-3\u4e2a\u6708\uff1a\u5efa\u7acb\u76f4\u89c2\u7406\u89e3\n  \u2022 \u8ddf\u81ea\u5df1\u7684Lot\u8d70\u4e00\u904d\u5168\u6d41\u7a0b\uff08\u4ece\u5149\u523b\u5230CP\uff09\n  \u2022 \u6bcf\u5929\u770bWAT\u6570\u636e\u548cBin Map\uff0c\u548cSenior\u8ba8\u8bba\n  \u2022 \u5b66\u4f1a\u770bKLA\u62a5\u544a\u548cADC\u5206\u7c7b\n  \u2022 \u8bb0\u4f4f\u5e38\u89c1defect\u957f\u76f8\n  \n\u7b2c3-6\u4e2a\u6708\uff1a\u5efa\u7acb\u6570\u636e\u601d\u7ef4\n  \u2022 \u5b66\u4f1a\u7528JMP\/Spotfire\u505a\u57fa\u672c\u6570\u636e\u5206\u6790\n  \u2022 \u80fd\u505a\u7b80\u5355\u7684t-test\u5224\u65ad\u8d8b\u52bf\u662f\u5426\u663e\u8457\n  \u2022 \u5b66\u4f1a\u770bSPC\u63a7\u5236\u56fe\n  \u2022 \u80fd\u5bf9\u7740Bin Map+Defect Map\u505a\u521d\u6b65\u5224\u65ad\n\n\u7b2c6-12\u4e2a\u6708\uff1a\u72ec\u7acb\u5206\u6790\u95ee\u9898\n  \u2022 \u80fd\u72ec\u7acb\u505aSplit lot\u8bbe\u8ba1\n  \u2022 \u80fd\u4e3b\u5bfc\u826f\u7387\/\u7535\u6027\u95ee\u9898\u6392\u67e5\n  \u2022 \u5f00\u59cb\u79ef\u7d2f\"\u6a21\u5f0f\u8bc6\u522b\"\uff08\u770b\u5230\u8fd9\u4e2a\u73b0\u8c61\u2192\u8fd9\u4e2a\u539f\u56e0\uff09\n  \n1-2\u5e74\uff1a\u5f62\u6210\u4f53\u7cfb\n  \u2022 \u80fd\u9884\u6d4b\u5de5\u827a\u53d8\u5316\u5bf9\u7535\u6027\u7684\u5f71\u54cd\n  \u2022 \u80fd\u63d0\u524d\u8bc6\u522b\u826f\u7387\u98ce\u9669\u548c\u7f3a\u9677\u7a97\u53e3\n  \u2022 \u80fd\u548cModule\u5de5\u7a0b\u5e08\u6df1\u5ea6\u5bf9\u8bdd\u5e76\u8bf4\u670d\u5bf9\u65b9\n<\/code><\/pre>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h2 class=\"wp-block-heading\"><a href=\"https:\/\/note.youdao.com\/md\/#%E4%B8%83-pie%E5%B8%B8%E7%94%A8%E9%80%9F%E6%9F%A5%E5%AF%B9%E7%85%A7%E8%A1%A8\"><\/a>\u4e03\u3001PIE\u5e38\u7528&#8221;\u901f\u67e5\u5bf9\u7167\u8868&#8221;<\/h2>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u7535\u6027\u53d8\u5316<\/th><th>\u53ef\u80fd\u539f\u56e0 (Top 3)<\/th><th>\u4f18\u5148\u67e5\u4ec0\u4e48<\/th><\/tr><\/thead><tbody><tr><td>Idsat\u2193<\/td><td>Rsd\u2191, \u03bc\u2193, Vth\u2191<\/td><td>\u63a5\u89e6\u7535\u963b, \u6805\u6c27, \u6ce8\u5165<\/td><\/tr><tr><td>Ioff\u2191<\/td><td>Vth\u2193, \u6805\u6f0f\u7535, \u7ed3\u6f0f\u7535<\/td><td>\u77ed\u6c9f\u9053, Gox\u6f0f\u7535, \u7f3a\u9677<\/td><\/tr><tr><td>Vth\u6f02\u79fb<\/td><td>\u6ce8\u5165, \u6805\u6c27, \u70ed\u9884\u7b97<\/td><td>\u9631\/\u6c9f\u9053\u6ce8\u5165\u5242\u91cf<\/td><\/tr><tr><td>BV\u2193<\/td><td>\u7ed3\u6df1, STI, \u6ce8\u5165<\/td><td>Junction profile<\/td><\/tr><tr><td>Rs\u2191<\/td><td>Silicide, Contact<\/td><td>\u9000\u706b\u6e29\u5ea6, Contact\u586b\u5145<\/td><\/tr><tr><td>RO\u5ef6\u8fdf\u2191<\/td><td>Idsat\u2193, RC\u2191<\/td><td>FET\u9a71\u52a8, BEOL R\/C<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<p class=\"wp-block-paragraph\">\u8fd9\u4e2a\u6846\u67b6\u57fa\u672c\u8986\u76d6\u4e86\u4ece\u57fa\u7840\u77e5\u8bc6\u5230\u5b9e\u6218\u6280\u80fd\u7684\u5b8c\u6574\u94fe\u6761\u3002\u78b3\u5316\u7845\uff08SiC\uff09\u65b9\u5411\u7684PIE\u5728\u4f20\u7edf\u7845\u5de5\u827a\u57fa\u7840\u4e0a\u8fd8\u6709\u4e00\u4e9b\u7279\u6b8a\u70b9\uff08SiC\u6c27\u5316\u5c42\u754c\u9762\u8d28\u91cf\u3001\u66f4\u96be\u7684\u5e72\u6cd5\u523b\u8680\u3001\u9700\u8981\u9ad8\u6e29\u9000\u706b\u6fc0\u6d3b\u6ce8\u5165\u3001\u77ed\u8def\u5931\u6548\u6a21\u5f0f\u4e0d\u540c\u7b49\uff09\uff0c\u5982\u679c\u4f60\u9700\u8981\u6211\u53ef\u4ee5\u8fdb\u4e00\u6b65\u6574\u7406SiC\u7684PIE\u8865\u5145\u77e5\u8bc6\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u4e00\u3001PIE\u7684\u89d2\u8272\u5b9a\u4f4d PIE\u662f\u6676\u5706\u5382\u7684\u6280\u672f\u67a2\u7ebd\u2014\u2014\u8fde\u63a5\u5404\u4e2aModule\uff08\u5149\u523b\u3001\u523b\u8680\u3001\u8584\u819c\u3001\u6269\u6563\/CMP\u3001\u6ce8\u5165\u7b49 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[4],"tags":[],"class_list":["post-6","post","type-post","status-publish","format-standard","hentry","category-4"],"_links":{"self":[{"href":"https:\/\/core.iccourt.com\/index.php?rest_route=\/wp\/v2\/posts\/6","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/core.iccourt.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/core.iccourt.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/core.iccourt.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/core.iccourt.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=6"}],"version-history":[{"count":1,"href":"https:\/\/core.iccourt.com\/index.php?rest_route=\/wp\/v2\/posts\/6\/revisions"}],"predecessor-version":[{"id":8,"href":"https:\/\/core.iccourt.com\/index.php?rest_route=\/wp\/v2\/posts\/6\/revisions\/8"}],"wp:attachment":[{"href":"https:\/\/core.iccourt.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=6"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/core.iccourt.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=6"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/core.iccourt.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=6"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}